Thin Film Analyser – TFA
Product Description
Physical properties from thin-films are becoming more and more important in industries such as, phase-change optical disk media, thermoelectric materials, light emitting diodes (LEDs), phase change memories, flat panel displays, and the semiconductor industry. All these industries deposit a film on a substrate in order to give a device a particular function. Since the physical properties of these films differ from bulk material, these data are required for many different applications.
Specifications
| Model | Thin Film Analyser |
|---|---|
| General | |
| Temperature range | RT up to 280°C -170°C up to 280°C |
| Sample thickness | from only a few nm to µm range (depends on sample) |
| Measurement principle | chip based (pre structured measurement chips, 24 pcs. per box) |
| Despositiontechiques | include: PVD (sputtering, evaporation), ALD, spin coating, ink-jet printing and more |
| Measured parameters | Thermal Conductivity (3 Omega) Specific Heat |
| Optional | Seebeck Coefficient Electrical Resisitivity / Conductivity Hall Constant / Mobility / Charge carrier conc. permanent magnet 0.5 T or electromagnet up to 1 T |
| Vacuum | up to 10 -5 bar |
| Electronics | Integrated |
| Interface | USB |